Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532461 | Substrate processing apparatus | Shota Kaneko, Shuhei Yamabe | 2022-12-20 |
| 11515125 | Upper electrode and plasma processing apparatus | — | 2022-11-29 |
| 11443922 | High frequency power supply member and plasma processing apparatus | Yousuke Nagahata | 2022-09-13 |