Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264214 | Silicon carbide member for plasma processing apparatus, and production method therefor | Tomohisa Suzuki, Michito Miyahara | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264214 | Silicon carbide member for plasma processing apparatus, and production method therefor | Tomohisa Suzuki, Michito Miyahara | 2022-03-01 |