Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11534805 | Cleaning method and processing apparatus | Tomoya Hasegawa, Koji Sasaki | 2022-12-27 |
| 11538678 | Deposition method | Yuya TAKAMURA | 2022-12-27 |
| 11486041 | Film forming apparatus, control device, and pressure gauge adjustment method | — | 2022-11-01 |