Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492702 | Film-forming apparatus and film-forming method | Yuka NAKASATO | 2022-11-08 |
| 11339472 | Substrate processing apparatus | — | 2022-05-24 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492702 | Film-forming apparatus and film-forming method | Yuka NAKASATO | 2022-11-08 |
| 11339472 | Substrate processing apparatus | — | 2022-05-24 |