Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257707 | Substrate gripping mechanism, substrate transfer device, and substrate processing system | Masahiro DOGOME | 2022-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257707 | Substrate gripping mechanism, substrate transfer device, and substrate processing system | Masahiro DOGOME | 2022-02-22 |