Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515194 | Substrate processing apparatus, substrate processing system, and substrate transporting method | — | 2022-11-29 |
| 11373884 | Placing table and plasma treatment apparatus | Dai KITAGAWA, Tsutomu Nagai, Daisuke Hayashi, Satoru TERUUCHI | 2022-06-28 |