Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519067 | Method for depositing a silicon nitride film and film deposition apparatus | — | 2022-12-06 |
| 11417521 | Film forming method and film forming apparatus | — | 2022-08-16 |
| 11359279 | Cleaning method and film deposition method | Makoto Ishigo, Jun Sato | 2022-06-14 |
| 11264266 | Substrate processing method | Yuji Nishino | 2022-03-01 |
| 11248294 | Substrate processing apparatus | — | 2022-02-15 |