Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482427 | Substrate processing system and method for supplying processing fluid | Yasuo Kiyohara, Satoshi Okamura | 2022-10-25 |
| 11295965 | Cleaning apparatus and cleaning method of substrate processing apparatus | Kohei Yamada, Satoshi Biwa | 2022-04-05 |