Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538700 | Substrate processing apparatus and substrate processing method | — | 2022-12-27 |
| 11282719 | Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition | Kouji Takuma, Ryo Manabe, Jong Won Yun | 2022-03-22 |