Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264248 | Etching method and substrate processing apparatus | Yoshimitsu Kon, Lifu LI, Tomonori Miwa | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264248 | Etching method and substrate processing apparatus | Yoshimitsu Kon, Lifu LI, Tomonori Miwa | 2022-03-01 |