Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508589 | Substrate processing method, substrate processing apparatus and recording medium | Kouichirou Tanaka, Hiroshi Ichinomiya, Masahiro Fukuda | 2022-11-22 |
| 11488846 | Substrate processing method and substrate processing apparatus | — | 2022-11-01 |