Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476143 | Substrate processing apparatus and substrate receptacle storage method | Tatsuhiko Tsujihashi, Kousei Ide | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476143 | Substrate processing apparatus and substrate receptacle storage method | Tatsuhiko Tsujihashi, Kousei Ide | 2022-10-18 |