Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495452 | Method for producing silicon nitride film | Yoshinobu Shiba, Takashi Abe, Akira Nishimura | 2022-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495452 | Method for producing silicon nitride film | Yoshinobu Shiba, Takashi Abe, Akira Nishimura | 2022-11-08 |