Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473992 | Residual pressure measurement system for Fabry-Perot cavity of optical MEMS pressure sensor and method thereof | Shuang Wang, Junfeng Jiang, Tiegen Liu, Xue Mei WANG, Kun Liu +1 more | 2022-10-18 |