DR

Dong Ruan

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #2 of 19Top 15%
Overall (2022): #469,752 of 548,613Top 90%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11367636 Substrate transfer device, transfer method and photolithography apparatus Fulong Wu 2022-06-21