Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11453944 | Atomic layer deposition apparatus and atomic layer deposition method | Tatsuya Matsumoto | 2022-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11453944 | Atomic layer deposition apparatus and atomic layer deposition method | Tatsuya Matsumoto | 2022-09-27 |