Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264226 | Partly sealed ion guide and ion beam deposition system | Hartmut Schlichting, Johannes Barth, Andreas Walz | 2022-03-01 |
| 11222777 | Ion guide comprising electrode wires and ion beam deposition system | Hartmut Schlichting, Johannes Barth, Andreas Walz | 2022-01-11 |