Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521879 | Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod | Tatsuhiro KOTSUGAI, Takeshi Kagaya | 2022-12-06 |
TM
Toshihiko Miyajima
Overall (2022): #227,270 of 548,613Top 45%
1
Patents 2022