Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446713 | Gas purge unit and load port apparatus | Jun Emoto | 2022-09-20 |
| 11273472 | Bottom gas purge unit, load port apparatus, and bottom gas purge method | — | 2022-03-15 |
| 11276599 | Load port apparatus, EFEM, and method of installing load port apparatus | Takuya Kudo | 2022-03-15 |