Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11308254 | Method and system for reducing layout distortion due to exposure non-uniformity | Chi-Ta Lu, CHIA-HUI LIAO, Chi-Ming Tsai | 2022-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11308254 | Method and system for reducing layout distortion due to exposure non-uniformity | Chi-Ta Lu, CHIA-HUI LIAO, Chi-Ming Tsai | 2022-04-19 |