Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387748 | Self-aligned dielectric liner structure for protection in MEMS comb actuator | Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu | 2022-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387748 | Self-aligned dielectric liner structure for protection in MEMS comb actuator | Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu | 2022-07-12 |