Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11392025 | Apparatus for removing a pellicle frame from a photomask and the method thereof | Wei-Cheng Huang | 2022-07-19 |
| 11237478 | Cleaning module, cleaning apparatus and method of cleaning photomask | Yi-Hsun Pan | 2022-02-01 |