Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11292101 | Chemical mechanical polishing apparatus and method | Yu-Chen Wei, Shih-Ho Lin, Jen-Chieh LAI, Chun-Chieh Chan | 2022-04-05 |
| 11251063 | Article transporter in semiconductor fabrication | Yu-Chen Wei, Chih-Yuan Yang, Shih-Ho Lin, Jen-Chieh LAI | 2022-02-15 |