Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448978 | Contamination handling for semiconductor apparatus | Chih-Che Lin, Pei-Yi Su | 2022-09-20 |
| 11256180 | Processing apparatus and method thereof | Pei-Yi Su, Chih-Che Lin | 2022-02-22 |