Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289311 | Method and apparatus for reducing vacuum loss in an ion implantation system | Tsung-Min Lin, Cheng-Yi Huang, Chao-Po Lu | 2022-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289311 | Method and apparatus for reducing vacuum loss in an ion implantation system | Tsung-Min Lin, Cheng-Yi Huang, Chao-Po Lu | 2022-03-29 |