Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367632 | Heater lift assembly spring damper | Kai WU, Chun-Ta Chen, Cheng-Yi Huang | 2022-06-21 |
| 11335585 | Vacuum wafer chuck for manufacturing semiconductor devices | Chung-Hsien Liao | 2022-05-17 |
| 11237646 | Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine | Ming-Sze Chen | 2022-02-01 |