Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347143 | Cleaning method, method for forming semiconductor structure and system thereof | Wu-Hung Ko, Chung-Hung Lin | 2022-05-31 |
| 11340524 | Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomask | Tzu Han Liu, Chung-Hung Lin | 2022-05-24 |
| 11294275 | Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomask | Tzu Han Liu, Chung-Hung Lin | 2022-04-05 |
| 11239001 | Method for generating extreme ultraviolet radiation and an extreme ultraviolet (EUV) radiation source | Tzu Han Liu, Chung-Hung Lin | 2022-02-01 |