Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482430 | Space filling device for wet bench | Yen-Ji Chen, Cheng-Yi Huang | 2022-10-25 |
| 11414757 | Gas tube, gas supply system and manufacturing method of semiconductor device using the same | Yi-Shiung Chen, Cheng-Yi Huang, Shou-Wen Kuo, Po-Wen Chai | 2022-08-16 |
| 11270950 | Apparatus and method for forming alignment marks | Yen-Chen Liu, Cheng-Hao Yu, Cheng-Yi Huang, Chao-Li Shih | 2022-03-08 |