Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469119 | Substrate treatment apparatus | Satoshi NAKAOKA, Katsuhiro Sato | 2022-10-11 |
| 11469127 | Substrate processing device | Shigeru Kinoshita, Shusaku Matsumoto, Koichiro Kawano, Hiroshi Fujita | 2022-10-11 |