Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508629 | Nitride semiconductor laminate, method for manufacturing nitride semiconductor laminate, method for manufacturing semiconductor laminate, and method for inspecting semiconductor laminate | — | 2022-11-22 |
| 11473907 | Method for manufacturing semiconductor structure, inspection method, and semiconductor structure | — | 2022-10-18 |
| 11393693 | Structure manufacturing method and intermediate structure | Noboru Fukuhara | 2022-07-19 |
| 11377756 | Nitride crystal substrate and method for manufacturing the same | — | 2022-07-05 |
| 11380765 | Structure and intermediate structure | — | 2022-07-05 |
| 11367826 | Piezoelectric laminate, method of manufacturing the piezoelectric laminate and piezoelectric device | Kenji Shibata, Kazutoshi Watanabe | 2022-06-21 |
| 11342191 | Structure manufacturing method, structure manufacturing apparatus and intermediate structure | Noboru Fukuhara, Taketomo Sato, Masachika Toguchi | 2022-05-24 |
| 11342220 | Structure manufacturing method and manufacturing device, and light irradiation device | Noboru Fukuhara | 2022-05-24 |
| 11339500 | Nitride crystal substrate, semiconductor laminate, method of manufacturing semiconductor laminate and method of manufacturing semiconductor device | Takehiro Yoshida | 2022-05-24 |