Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414780 | Apparatus and method for manufacturing epitaxial wafer | Naoyuki Wada, Yasutaka Takemura | 2022-08-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414780 | Apparatus and method for manufacturing epitaxial wafer | Naoyuki Wada, Yasutaka Takemura | 2022-08-16 |