Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11214863 | Method of controlling contamination of vapor deposition apparatus and method of producing epitaxial wafer | — | 2022-01-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11214863 | Method of controlling contamination of vapor deposition apparatus and method of producing epitaxial wafer | — | 2022-01-04 |