Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11274371 | Susceptor and epitaxial growth device | Shoji Nogami, Naoyuki Wada, Takayuki Kihara | 2022-03-15 |
| 11264265 | Lift pin, and epitaxial growth apparatus and method of producing silicon epitaxial wafer using the lift pin | — | 2022-03-01 |