Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11529655 | Nozzle, substrate processing apparatus including the same, and substrate processing method | Oh Jin Kwon, Sehyeong Choi | 2022-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11529655 | Nozzle, substrate processing apparatus including the same, and substrate processing method | Oh Jin Kwon, Sehyeong Choi | 2022-12-20 |