Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501976 | Substrate processing method and substrate processing apparatus | Seiichi Watanabe, Kazuki Narishige, Xinhe Jerry Lim, Jianfeng Xu, Yi Hao Ng +10 more | 2022-11-15 |
| 11423230 | Process extraction apparatus and non-transitory computer readable medium | — | 2022-08-23 |