Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11229893 | Method of producing a silicon compound material and apparatus for producing a silicon compound material | Yasuyuki Fukushima, Kozue Akazaki, Yasutomo Tanaka, Kazuma AKIKUBO, Takeshi Nakamura +4 more | 2022-01-25 |