Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309320 | Semiconductor storage device | — | 2022-04-19 |
| 11289351 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tadashi Kontani, Shigenori TEZUKA | 2022-03-29 |