Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270054 | Method and system for calculating printed area metric indicative of stochastic variations of the lithographic process | Hyejin Jin, John L. Sturtevant, Shumay D. Shang, Azat Latypov, Germain Louis Fenger | 2022-03-08 |