Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437263 | Electrostatic chuck and substrate fixing device | Masaya Tsuno | 2022-09-06 |
| 11370709 | Ceramic member | Tomotake Minemura | 2022-06-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437263 | Electrostatic chuck and substrate fixing device | Masaya Tsuno | 2022-09-06 |
| 11370709 | Ceramic member | Tomotake Minemura | 2022-06-28 |