Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435666 | Salt compound, chemically amplified resist composition, and patterning process | Masayoshi Sagehashi, Masahiro Fukushima, Yuki Kera | 2022-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435666 | Salt compound, chemically amplified resist composition, and patterning process | Masayoshi Sagehashi, Masahiro Fukushima, Yuki Kera | 2022-09-06 |