Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340118 | Method for high-accuracy wavefront measurement base on grating shearing interferometry | Yunjun Lu, Feng Tang | 2022-05-24 |
| 11215512 | Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof | Feng Tang, Yunjun Lu, Changzhe Peng, Yang Liu | 2022-01-04 |