Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538923 | Method for etching back hard mask layer on tops of dummy polysilicon gates in gate last process | Shidong Fu, Ran Huang, Ying Xu | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538923 | Method for etching back hard mask layer on tops of dummy polysilicon gates in gate last process | Shidong Fu, Ran Huang, Ying Xu | 2022-12-27 |