Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11352711 | Fluid recovery in semiconductor processing | Sam Lee, Eric J. Bergman | 2022-06-07 |
| 11274377 | Seal apparatus for an electroplating system | Manjunatha Vishwanatha Adagoor, Karthikeyan Balaraman, Karthick Vasu, Shailesh Chouriya | 2022-03-15 |
| 11268208 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2022-03-08 |
| 11262662 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2022-03-01 |
| 11241718 | Cleaning components and methods in a plating system | Joseph Antony Jonathan, Jason Rye, James Emery Brown, Gregory J. Wilson, Eric J. Bergman +2 more | 2022-02-08 |
| 11214890 | Cleaning components and methods in a plating system | — | 2022-01-04 |