Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309181 | Sputtering apparatus, sputtering target, and method for forming semiconductor film with the sputtering apparatus | Masahiro Watanabe, Yasuharu HOSAKA, Kenichi OKAZAKI, Shunpei Yamazaki | 2022-04-19 |