Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367646 | Electrostatic chuck and electrostatic chuck apparatus including the same | Yoshiaki Moriya | 2022-06-21 |
| 11244847 | Substrate treating apparatus and substrate treating method | Harutyun Melikyan, Jong Hwan An, Jamyung Gu, Young Bin Kim, Shin-Woo Nam | 2022-02-08 |