Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511321 | Substrate processing method and substrate processing apparatus | Young Jin Kim, Jin Tack Yu, Bu Young JUNG, Byung Sun BANG, Seung Hoon Oh +1 more | 2022-11-29 |
| 11361962 | Method and apparatus for processing substrate | Seung Hoon Oh, Jin Tack Yu, Bu Young JUNG, Byung Sun BANG, Young Jin Kim +1 more | 2022-06-14 |