Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530375 | Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus | Hae-Won Choi, Kihoon Choi, Chan Young Heo, Anton Koriakin, Do Heon Kim +1 more | 2022-12-20 |
| 11410862 | Apparatus for processing substrate including cooling member closer to central axis than heating member | Kihoon Choi, Hae-Won Choi, Anton Koriakin, Chan Young Heo, Do Heon Kim +1 more | 2022-08-09 |