Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380565 | Substrate transfer apparatus, substrate processing apparatus including the same, and substrate misalignment compensation method | Hyun Jun Kim | 2022-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380565 | Substrate transfer apparatus, substrate processing apparatus including the same, and substrate misalignment compensation method | Hyun Jun Kim | 2022-07-05 |