Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495467 | Method and apparatus for etching thin layer | Jung Suk GOH, Jae Seong LEE, Kuk Saeng KIM, Young Dae CHUNG, Tae Shin KIM +12 more | 2022-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495467 | Method and apparatus for etching thin layer | Jung Suk GOH, Jae Seong LEE, Kuk Saeng KIM, Young Dae CHUNG, Tae Shin KIM +12 more | 2022-11-08 |