XY

Xiaoping Yan

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #2 of 19Top 15%
Overall (2022): #206,583 of 548,613Top 40%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11469121 Spin coating device and method Shiliang Lu, Hang Ran, Yihui Li, Jun Zhao, Shanshan Chen 2022-10-11